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» New sputter deposition tool makes first runs |
NewsWednesday, 18 November 2009 The new AJA Orion(R) five-gun DC/RF sputter deposition tool is making its first runs. User training will commence in the next two weeks. Our initial sputter target set includes W, W/Ti, Ti, Al, Cr, Cu, Ni, Fe, Co, and Ni/Fe, ITO, SiO2, and Al2O3. Staff assignments and training schedules will be announced. RJD |
